Step & flash imprint lithography
Douglas J. Resnicka and S.V. Sreenivasanb and C. Grant Willsonc

1-s2.0-S1369702105007005-main.pdf2.59MB
Type: Paper
Tags: lithography

Bibtex:
@article{,
title= {Step & flash imprint lithography},
keywords= {lithography},
journal= {elsevier},
author= {Douglas J. Resnicka and S.V. Sreenivasanb and C. Grant Willsonc},
year= {2005},
url= {10.1016/S1369-7021(05)00700-5},
license= {CC BY NC ND},
abstract= {Douglas J. Resnicka,Motorola Labs, 2100 East Elliot Road, Tempe, AZ 85284, USA
S.V. Sreenivasanb, Molecular Imprints, Inc., 1807-C West Braker Ln., Austin, TX 78758, USA
C. Grant Willson, Department of Chemical Engineering, The University of Texas at Austin, Austin, TX 78712, USA

Douglas J. Resnicka, , S.V. Sreenivasanb, C. Grant Willsonc},
superseded= {},
terms= {}
}


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